Strasbaugh nTellect 7AF - Page 521

Operations and Maintenance Manual Troubleshooting
Version 1.2 - June 2004 14 - 7
SUBJECT ACTION FREQUENCY
Work Chuck Flatness
Inspection and Check
Even Blow-Off and
Backflush
Dress, inspect, and check work chuck
flatness; record:
• Flatness in
inches _____
Readjust chuck backflush and blow off.
Dress the work chuck.
Monthly
As needed