Strasbaugh nTellect 7AF - Page 1540

STRASBAUGH, INC.
7-8 February 19, 2002 7AF SECS/GEM Interface Ver. 1.9
Strasbaugh Confidential
1. ControlState is Remote. The Equipment operator switches the Equipment to
Local Control.
2. H <- E S6F11 W The Equipment signals CEID GemControlState LOCAL. Event Reports as
appropriate.
3. H -> E S6F12 The Host acknowledges the report.
7.4.7 Go Local, Host-Initiated
Step SECS Message Description
1. ControlState is Remote.
2. H -> E S2F41 [W] Remote Command (GO LOCAL). The Host commands the Equipment to go
into Local Control.
3. H <- E S2F42 If the W-bit in S2F41 is 1, the Equipment acknowledges the command.
HCACK is zero.
4. H <- E S6F11 W The Equipment signals CEID GemControlState LOCAL. Event Reports as
appropriate.
5. H -> E S6F12 The Host acknowledges the report.
7.4.8 Operator Command, Successful
Step SECS Message Description
1.
ControlState is Local. The operator issues a front-panel INITIATE
PROCESS command. The Equipment performs the command.
2. H <- E S6F11 W The Equipment signals CEID LotStart. Event Reports as appropriate.
3. H -> E S6F12 The Host acknowledges the report.
7.5 Process Program Management
7.5.1 Unformatted, Host-Initiated Download
Step SECS Message Description
1. H -> E S7F1 W Host requests permission to send a multi-block Process Program to the
Equipment. If the Process Program is single-block, this step and the next one
may be skipped.
2. H <- E S7F2 The Equipment grants permission for the Host to send the Process Program.
3. H -> E S7F3 W Host sends the process Program to the Equipment.
4. H <- E S7F4 The Equipment acknowledges receipt of the Process Program. The
Equipment checks the received Process
Program for validity. If the process Program is valid, the Equipment stores
the Process Program in its library and sends an acknowledge code of zero in
this message. If the Process Program is not valid, or could not be stored in
the library, the acknowledge code in this message is non-zero.
7.5.2 Unformatted, Host-Initiated Upload
Step SECS Message Description
1. H -> E S7F5 W Host requests a Process Program from the Equipment library.
2. H <- E S7F5 The Equipment sends the Process Program. If the Process Program does not
exist, the data portion of this message is an empty list.