STRASBAUGH, INC.
8-4 February 19, 2002 7AF SECS/GEM Interface Ver. 1.9
Strasbaugh Confidential
24 SV U2 RT
PREALIGNERSTATUS: PreAligner Status
Bit # Meaning
0 Previous command not executed
1 Previous command not valid
2 Vacuum switch activated
3 Vacuum valve not activated
4 Motor error on one or more axes
5 One or more limit switches activated
6 One or more axes not homed
7 Alignment error
8 Running Macro
9 One or more axes are moving
10 Servo off on one or more axes
11 Error on COM2
12 Not used, always 1
13 NV-SRAM error
14 Controller error
15 Error on COM1
Process and Lot Information
25 DV A[12] I
NEXTLOTIDTOUSE: Next Lot ID to Use
Lot ID that will be assigned to the wafers in the next cassette to be
loaded.
26 SV A[0...8] I
PPEXECNAME:
The PPID of the currently selected Process Program.
27 SV U1 S
GRINDTYPE: Grind Type
Value Meaning
0 None
1 Coarse
2 Fine
3 Both
4 None
5 Left
6 Right
7 Both
28 SV U2 I
WAFERDIAMETER: Wafer Diameter
Value Meaning
100/4 100mm / 4 inch wafer diameter
125/5 125mm / 5 inch wafer diameter
150/6 150mm / 6 inch wafer diameter
200/8 200mm / 8 inch wafer diameter
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