STRASBAUGH, INC.
7AF SECS/GEM Interface Ver. 1.9 February 19, 2002 8-5
Strasbaugh Confidential
8-5
29 SV U1 I
SEND1TURRETSTATUS: Send 1 Turret Status
Bit # Meaning
0 Operator Position
1 Robot Position
2 Cassette Present
3 Active
4 Waiting for Scan
5 Cross Slotted Wafer
6 Count Valid
7 Not Used
30 SV U1 I
SEND1TURRETWAFERCOUNT: Send 1 Turret Wafer Count
Count is valid only when count valid is true, which is: in robot position,
cassette is present, not waiting for scan and not cross slotted wafer.
31 SV U1 I
SEND2TURRETSTATUS: Send 2 Turret Status- See Definition in “Send 1
Turret Status”
32 SV U1 I
SEND2TURRETWAFERCOUNT: Send 2 Turret Wafer Count- See
Definition in “Send 1 Wafer Count”
33 SV U1 I
RECEIVE1TURRETSTATUS: Receive 1 Turret Status- See Definition in
“Send 1 Turret Status”
34 SV U1 I
RECEIVE1TURRETWAFERCOUNT: Receive 1 Turret Wafer Count -
See Definition in “Send 1 Wafer Count”
35 SV U1 I
RECEIVE2TURRETSTATUS: Receive 2 Turret Status - See Definition in
“Send 1 Turret Status”
36 SV U1 I
RECEIVE2TURRETWAFERCOUNT: Receive 2 Turret Wafer Count -
See Definition in “Send 1 Wafer Count”
37 SV U1 F
WAFERSLOCATEDAT: Wafers Located At
Bit # Meaning
0 Aligner
1 Left Chuck
2 Right Chuck
3 Spin Station
4 Robot
5 Not Used
6 Not Used
7 Not Used
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