STRASBAUGH, INC.
7AF SECS/GEM Interface Ver. 1.9 February 19, 2002 9-1
Strasbaugh Confidential
9-1
9. Appendix B -- Collection Events
CE ID Name and Description
Machine State (Not Process Related)
1 Power on start
2 Wafer recipe modified
3 Wheel recipe modified
4 Chuck recipe modified
5 New recipe selected
6 Machine Variables written
7 Equipment Constant change
8 Equipment State changed
9 Servo status A changed
10 Servo status B changed
11 Operator command in remote
GEM Related
12 S10Ack - Message acknowledge
13 Control State Local
14 Control State Remote
15
Security
16 No Security Level
17 Production Security Level Entered
18 Process Security Level Entered
19 Maintenance Security Level Entered
20 Access Denied
Material Handling (Data, too)
21 Coarse wafer grind complete (data ready)
22 Fine wafer grind complete (data ready)
23 Send turret 1 state changed
24 Send turret 1 material received (cassette loaded)
25 Send turret 2 state changed
26 Send turret 2 material received (cassette loaded)
27 Receive turret 1 state changed
28 Receive turret 1 material removed (cassette unloaded)
29 Receive turret 2 state changed
30 Receive turret 2 material removed (cassette unloaded)
31 Process State Change
32 Main Screen - (Idle)
33 Home Screen - (Idle)
34 Grind Screen - Wait for Start
35 Grind Screen - Wait for Quit Screen (Processing Stopped)
36 Dress Screen - Wait for Start
37 Dress Screen - Wait for Quit Screen
38 Edit Screen
39 Maintenance Screen
40 Data Screen
41 Start wafer grind cycle - (Processing Started)
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