STRASBAUGH, INC.
9-2 February 19, 2002 7AF SECS/GEM Interface Ver. 1.9
Strasbaugh Confidential
42 Referencing - Home Screen and Request Reference
43 Homing - Home Screen and at least 1 home request
44 Dress fine wheel
45 True fine wheel
46 Dress coarse wheel
47 True coarse wheel
48 Dress left chuck
49 True left chuck
50 Dress right chuck
51 True right chuck
52 Stopping grind cycle (wafer, dress, true) (Processing Completed)
53 Pause grinding - Wait to continue or stop
54-75 Reserved for Future Process States
76 Bad Download Event
77 Wafer Moved to New Station (Grind Cycle only)
1000-
1099
Alarm CEIDs defined in Appendix C -- Alarms
2000 WATERTEMPERATURE Limit Event
2001 COARSEFEEDRATE Limit Event
2002 FINEFEEDRATE Limit Event
2003 COARSEGRINDFORCE Limit Event
2004 FINEGRINDFORCE Limit Event
2005 COARSEWHEELPOSITION Limit Event
2006 FINEWHEELPOSITION Limit Event
2007 COARSEPROBEREADING Limit Event
2008 FINEPROBEREADING Limit Event
2009 COARSEVACUUMREADING Limit Event
2010 FINEVACUUMREADING Limit Event
2011 COARSECOOLANTFLOW Limit Event
2012 FINECOOLANTFLOW Limit Event
2013 COARSEMOTORCURRENT Limit Event
2014 FINEMOTORCURRENT Limit Event
2015 COARSEWHEELWEAR Limit Event
2016 FINEWHEELWEAR Limit Event
5001 PPCHANGE The operator created, changed or deleted a process program.
5002 EQUIPMENTOFFLINE The operator set the equipment Communication State to
Off Line.
5003 CONTROLSTATELOCAL Operator or Host set equipment Control State to On
Line Local.
5004 CONTROLSTATEREMOTE Operator set equipment Control State to On Line
Remote.
5005 SPOOLINGACTIVATED Equipment has started spooling.
5006 SPOOLINGDEACTIVATED The spool has been completely transmitted or purged.
5007 SPOOLTRANSMITFAILURE An attempt to transmit a spooled message failed.
5008 Equipment Constant Change The Operator or Host has changed an Equipment
Constant
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