STRASBAUGH, INC.
7AF SECS/GEM Interface Ver. 1.9 February 19, 2002 10-1
Strasbaugh Confidential
10-1
10. Appendix C -- Alarms
Alarm
ID
CEID
OFF
CEID
ON
Name and Description
1 1002 1003 Coarse Spindle PSI - Air bearing pressure low
2 1004 1005 Fine Spindle PSI - Air bearing pressure low
3 1006 1007 Left Chuck PSI - Air bearing pressure low
4 1008 1009 Right Chuck PSI - Air bearing pressure low
5 1010 1011 Service Panels Open
6 1012 1013 Operator Door Open
7 1014 1015 Left Chuck Servo
8 1016 1017 Right Chuck Servo
9 1018 1019 Coarse Z Servo
10 1020 1021 Fine Z Servo
11 1022 1023 Spin Station Servo
12 1024 1025 Bridge Servo
13 1026 1027 Coarse Servo H2O - Motor cooling water insufficient
14 1028 1029 Fine Servo H2O - Motor cooling water insufficient
15 1030 1031 LT Chuck Servo H2O - Motor cooling water insufficient
16 1032 1033 RT Chuck Servo H2O - Motor cooling water insufficient
17 1034 1035 Left Chuck DI Coolant - Grinding coolant flow insufficient
18 1036 1037 Right Chuck DI Coolant - Grinding coolant flow insufficient
19 1038 1039 Left Probe - Incorrect position or not referenced
20 1040 1041 Right Probe - Incorrect position or not referenced
21 1042 1043 Left Chuck Vac - Wafer on without sufficient vacuum
22 1044 1045 Right Chuck Vac - Wafer on without sufficient vacuum
23 1046 1047 Spin Station Vac - Wafer on without sufficient vacuum
24 1048 1049 Left Condition Arm - Incorrect position or switch
25 1050 1051 Right Condition Arm - Incorrect position or switch
26 1052 1053 Bad Wafer Diameter – An invalid wafer diameter has been
detected in the recipe
27 1054 1055 Robot Chuck Vac - Vacuum not detected
28 1056 1057 Spin Lid Up/Down - Incorrect position or switch
29 1058 1059 Spin Chuck Up/Down - Incorrect position or switch
30 1060 1061 Coarse Z LoadCell - Reading out of range
31 1062 1063 Fine Z LoadCell - Reading out of range
32 1064 1065 Aligner Vac - Vacuum not detected
33 1066 1067 Robot Coordinates – Illegal values have been detected in the
robot coordinates
34 1068 1069 Bad Wafer Thickness - Wafer being used is too thick or too
thin
35 1070 1071 Counterbalance - Initial balance over 31 LBS, bad
36 1072 1073 CZ, FZ Servo Error - Reference step never reached
37 1074 1075 Cross Slot/Cassette - wafer or cassette not level
38 1076 1077 Prealigner Error - Incorrect status detected
39 1078 1079 Coarse Force Limit - Force grinding, advance stopped
40 1080 1081 Fine Force Limit - Force grinding, advance stopped
41 1082 1083 Thickness Limit - Wafer is too thick or thin to begin grind
42 1084 1085 Robot Servo Error - Servo is off during operation
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