STRASBAUGH, INC.
10-2 February 19, 2002 7AF SECS/GEM Interface Ver. 1.9
Strasbaugh Confidential
43 1086 1087 Grind Abort: Unsafe! - Grinding aborted due to transient
condition
44 1088 1089 Robot Communication - COM port error
45 1090 1091 New Recv Cassette! - Due to full or batch complete
46 1092 1093 New Send Cassette! – No wafers at start cycle
47 1094 1095 Hand Close Turrets! – Unable to determine correct control
on power-up
48 1096 1097 Spin Station Home – Sensor not detected and offsets
requested
49 1098 1099 Service Panel Abort – Grinding aborted due to an open
service panel
50 1100 1101 Lt Chuck Vac Abort – Grinding aborted due to insufficient
vacuum
51 1102 1103 Rt Chuck Vac Abort – Grinding aborted due to insufficient
vacuum
52 1104 1105 Coarse Spindle Servo
53 1106 1107 Fine Spindle Servo
54 1108 1109 Left Grind Seal – Incorrect position or switch
55 1110 1111 Right Grind Seal – Incorrect position or switch
56 1112 1113 Left Chuck Homing Error – Sensor not detected and offsets
requested
57 1114 1115 Right Chuck Homing Error – Sensor not detected and offsets
requested
58 1116 1117 Exhaust Failure – Warning of a leak of grind dust into the
air. This will abort a grind, dress or true operation.
59 1118 1119 Left Probe is Down – Obstacle prevents Bridge motion
60 1120 1121 Right Probe is Down – Obstacle prevents Bridge motion
61 1122 1123 Coarse Wheel is Down – Obstacle prevents Bridge motion
62 1124 1125 Fine Wheel is Down – Obstacle prevents Bridge motion
63 1126 1127 LT Grind Seal Vacuum – Grind seal needs vacuum to deflate
properly
64 1128 1129 RT Grind Seal Vacuum – Grind seal needs vacuum to
deflate properly
65 1130 1131 LT Probe is Stuck – Possible damage to the wheel and/or
chuck because the measuring probe is not moving
66 1132 1133 RT Probe is Stuck – Possible damage to the wheel and/or
chuck because the measuring probe is not moving
67 1134 1135 CZ, FZ, Brg Servo Error – Coarse Z, Fine Z or Bridge Z axis
error
68 1136 1137 Servo Home Sensor – Servo unexpectedly in Home position
69 1138 1139 Positive Overtravel – Servo moved beyond the Positive limit
switch
70 1140 1141 Negative Overtravel – Servo moved beyond the Negative
limit switch
71 1142 1143 Servo Amplifier Fault – Amplifier hardware error
72 1144 1145 Servo Acceleration Limit – Acceleration too fast
73 1146 1147 Servo Velocity Limit – speed too fast
74 1148 1149 Negative Limit Switch – Servo unexpectedly at the Negative
limit switch
75 1150 1151 Positive Limit Switch – Servo unexpectedly at the Positive
limit switch
76 1152 1153
Actual position too far from the
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