STRASBAUGH, INC.
7AF SECS/GEM Interface Ver. 1.9 February 19, 2002 10-3
Strasbaugh Confidential
10-3
commanded position (this will also occur if the amplifier
fails completely
77 1154 1155 Servo Command Error – Error in the 7AF software
78 1156 1157 Servo Out of Frames – Internal error in the MEI card
79 1158 1159 Servo Trig by Other – Internal error in the MEI card
80 1160 1161 Need No Flip Option – Requested feature must be purchased
separately
81 1162 1163 Robot Controller – The robot controller has detected a ad
status.
82 1164 1165 Aligner Controller – The alaigner controller has detected a
bad status.
83 1166 1667 Inconsistent Recipe – A recipe discrepancy, such as
removing move material than the thickness of the wafer, has
been detected.
84 1168 1169 Drain Failure – Indicates that the machine drain has been
plugged up. This will abort a grind, dress or true operation.
85 1170 1171 Main PSI Failure – The optional PSI Reserve has been
activated due to a drop in main air pressure. This will abort a
grind, dress or true operation.
86 1172 1173 Bad Reference – Error during the Reference that precedes
Dress Chuck or True Chuck operations
87 1174 1175 Need Dual Grind Option – A 7AF option which has not been
installed has been requested.
88 1176 1177 Need 2-Sided Grind Option – A 7AF option which has not
been installed has been requested.
89 1178 1179 Need Semi-Probeless grind Option – A 7AF option which
has not been installed has been requested.
90 1180 1181 Need Probeless Grind Option – A 7AF option which has not
been installed has been requested.
91 –
256
Not Used
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