Operations and Maintenance Manual Operator Functions
Version 1.2 - June 2004 8 - 33
• QUIT When all assemblies have been homed, touch the
QUIT button to return to the Main Menu.
HOME INDIVIDUAL SERVOS MANUALLY
Homing of individually selected servos is useful in conjunction with performance of
mechanical and software calibration maintenance procedures.
WARNING! Before beginning the homing sequence, check for potential
crash situations due to previous movement of assemblies
using the manual controls at the Machine Maintenance
menu.
Touch the icon of the axis to be homed (for example, the robot) to home that axis
individually:
Operator Action Explanation/Screen Display
1. Clear machine. Verify that the machine has been cleared of
wafers and the robot, pre-aligner, fine z-axis,
coarse z-axis, and bridge are free of
obstructions.
2. Home Machine At the Main Menu, touch the "Home Machine"
button to select the Home Machine menu.
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