Strasbaugh nTellect (Model 7AF) Wafer Grinder
8 - 74 Version 1.2 - June 2004
OPERATOR DAILY PREVENTIVE
MAINTENANCE SCHEDULE
This schedule is repeated in the Preventive Maintenance chapter of this manual.
Notice: As a part of Operator Daily Preventive Maintenance, the Operator is
responsible for reporting anything indicating abnormal operation. For
example:
abnormal noises or vibrations
malfunctions
questionable product
WARNING:
Confirm that the diamond wheel is not spinning before beginning any maintenance
inspection or procedure.
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