Operations and Maintenance Manual Operator Functions
Version 1.2 - June 2004 8 - 79
FAULT, ACKNOWLEDGED: RED STEADY, NO ALARM SOUNDS
This state indicates that a fault has occurred, but that an operator has touched the
screen to acknowledge the presence of the fault. Clear this state by eliminating the
cause of the fault. With this condition, wafer processing has stopped or will be
stopped very soon. When this state exists, carefully observe the machine before
stopping the cycle, as the machine will attempt to complete the processing of as many
wafers as safely possible—wait for any wafers still being processed to finish before
terminating the process.
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