Strasbaugh nTellect (Model 7AF) Wafer Grinder
8 - 78 Version 1.2 - June 2004
FAULT: RED FLASHING, ALARM SOUNDS
Whenever a "FAULT" message is displayed, requesting operator attention, the light
tower changes to flashing read and the alarm sounds within five seconds of the
screen’s display of the message. The five second delay before the light begins flashing
and the alarm begins sounding permits the operator to respond before the alarm
sounds. A fault state will occur when wafer processing is stopped due to any of the
following
• detectable error by the operator (example: failure to place a receive
cassette in the machine)
• dangerous condition (example: loss of air pressure)
• temporary but potentially serious condition (example: robot vacuum error)
Operation under dangerous conditions will be stopped to the best of the machine’s
ability, but any wafer processing that can continue safely will proceed.
This state will be cleared when the reason for the fault is cleared. If the fault is
spontaneously cleared and production is continued, the previous state will be restored.
If the fault persists, the operator can acknowledge the fault by touching any button or
any inactive part of the menu screen to communicate to the machine that the fault has
been recognized. After the operator acknowledges the fault, the machine will move to
a "Fault Acknowledged" state (see below) with the "FAULT" message continuing to
display but the alarm off.
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