Atmospheric Pre-aligner Manual
4000-0015 Rev 1
ii
First Edition (December 1998)
This is the first edition of the Atmospheric Pre-aligner Manual, Document Number 4000-
0015. It documents the PRE-050, PRE-200, PRE-201, PRE-300, PRE-301, and PRE-350
atmospheric wafer pre-aligners.
Please send any comments or suggestions concerning this manual to:
Customer Support Department
PRI Automation/Equipe Division
455 North Bernardo Avenue
Mountain View, California 94043
© Copyright PRI Automation/Equipe Division 1998. All rights reserved. The
information contained herein is the property of PRI Automation/Equipe Division and may
not be reproduced nor disclosed to any third party, in whole or in part, by any method,
without the prior written permission of PRI Automation/Equipe Division.
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