Atmospheric Pre-aligner Manual
4000-0015 Rev 1
iii
About This Book
This manual is intended for PRI Automation/Equipe Division customers
who have purchased an atmospheric wafer pre-aligner. This manual
describes the installation, operation, and troubleshooting of the Equipe
PRE-050, PRE-200, PRE-201, PRE-300, PRE-301 and PRE-350 pre-
aligners.
The pre-aligner is an optional component in a robotic system, which
includes a robot, either single-arm or dual-arm, an Equipe controller and,
optionally, a track, a flipper, laser scanner, or front-end loader. In
addition, the robotic system might include one or more customer
components.
The example instructions in this manual cannot be specific to your
specialized system. Instead, the instructions assume a pre-aligner only
system. That is, if your system includes more components than a pre-
aligner and a controller, refer to the other component manuals to
coordinate the installation and operation of your system.
What’s Not in This Book
Several Equipe commands are used in this manual, but complete reference
information is not provided here. For a reference listing of Equipe
commands, refer to the Equipe Software Manual. Until the Software and
Controller Manual, Document Number 4000-0012, is available, use the
ESC 200 Series Controller Software Manual, September 1995.
For specific information on each component in a robotic system, refer to
the manual for that component, such as the Robot Manual. The two robot
manuals are the Atmospheric Single-Arm Robot Manual, Document
Number 4000-0016, and the Atmospheric Dual-Arm Robot Manual,
Document Number 4000-0166. The Teach Pendant and the EQT user
interface are described in the Equipe User Interface Manual, Document
number 4000-0017.
Contacting PRI Automation/Equipe Division Customer Support Department
If you experience a problem with a PRI Automation/Equipe Division
product, call the Customer Support Hotline at 1-888-775-7700 or dial 1-
650-404-2501 and request Customer Support. The facsimile number is 1-
650-404-2502.
When you request technical support, you are given help with
troubleshooting over the telephone. If this troubleshooting indicates that a
component requires repair, you have two options:
• Return the unit for repair at PRI Automation/Equipe Division.
• Request on-site service by a Customer Support Engineer. You and
Equipe agree on an action plan.
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