Operations and Maintenance Manual Machine Setup
Version 1.2 - June 2004 9 - 19
STEP 5 - QUIT AND SAVE CHANGES
When you have finished changing parameters for the spreadsheet displayed, save the
data and return to the Main Menu:
Note: There are 33 parameters available for each recipe. Be sure to save the data
you just entered before returning to the Main Menu.
Operator Action Explanation/Screen Display
1. QUIT At the Wafer Recipes menu, touch the "QUIT" button.
2. Yes Touch the "Yes" button at the Save Grind Data message
to save the parameter values currently displayed at the
Wafer Recipes menu to a file.
3. OK Touch the "OK" button to confirm.
The data is saved, and the Main Menu is then displayed.
Note: To enter parameter values for another recipe, you
must return to the Wafer Recipes menu and repeat the
data entry process.
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