Vacuum Robot Manual
4000-0315 Rev 1
iii
About This Book
This manual is intended for PRI Automation/OEM Systems (formerly
Equipe Technologies) customers who have purchased a vacuum single-
arm robot, 400 or 500 series, herein referred to simply as a robot. The
robot is one component in a vacuum system, which includes an Equipe
Smart Controller (ESC) and any optional items, such as a pre-aligner,
indexer, loadlock, or other peripheral device. In addition, the robotic
system might include one or more customer components.
The intent of this manual is to document how to install and use the
vacuum robot. The example instructions in this manual are not specific to
a particular system. This manual does not document every possible device
in a vacuum system.
For specific information on other components in a vacuum wafer transfer
system, refer to the manual for that component.
• The Equipe Vacuum Pre-aligner Manual, Document Number 4000-
0554, documents the 200 mm and 300 mm vacuum pre-aligners.
• The Equipe Software and Controller Manual, Document Number
4000-0012, documents the Equipe controllers and provides reference
information on all commands. Several Equipe commands are used in
this manual, but complete reference information is not provided here.
• The Equipe User Interface Manual, Document Number 4000-0017,
documents the Teach Pendant and the EQT 32 user interface.
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