Strasbaugh nTellect (Model 7AF) Wafer Grinder
9 - 32 Version 1.2 - June 2004
STEP 3 - QUIT AND SAVE CHANGES
When you have finished changing parameters for the spreadsheet displayed, save the
data and return to the Wafer Recipes menu:
Note: There are 26 parameters available for each dressing and truing recipe. Be
sure to save the data you just entered before returning to the Wafer Recipes
menu.
Operator Action Explanation/Screen Display
1. QUIT At the Wheel and Chuck Recipes menu, touch the
"QUIT" button.
2. Yes Touch the "Yes" button at the Save Data message to save
the parameter values currently displayed at the Wheel
and Chuck Recipes menu to a file.
3. OK Touch the "OK" button to confirm.
The data is saved, and the Wafer Recipes menu is then
displayed.
Note: To enter parameter values for another recipe, you
must return to the Wheel and Chuck Recipes menu and
repeat the data entry process.
PRE-ALIGNER SECOND FLAT SENSING – OPTION
This option provides the capability to sense the second or “minor” flat of a wafer and
thereby determine if the wafer has been loaded with the correct side facing upward.
This option can also flip the wafer over if it does not sense the minor flat, and then re-
check that the minor flat is in the correct position. This option only works with 3 inch
to 4.25 inch wafers, and the micrometer sensor adjustment must be reset with each
change in wafer diameter.
Under normal circumstances the sensor will expect to find the minor flat 90 degrees
clockwise from the major flat, however, the software will accommodate an offset to
allow sensing the minor flat at other locations. The software release notes (distributed
with the machine software) will contain additional information concerning the
adjustment of this option.
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