Operations and Maintenance Manual Preventive Maintenance Schedules
Version 1.2 - June 2004 10 - 1
10
Preventive Maintenance
Schedules
• Daily Maintenance Schedule
• 7-Day or 5,000 Wafer Maintenance
• 30-Day or 20,000 Wafer Maintenance
• 180-Day or 80,000 Wafer Maintenance
• 365-Day or 160,000 Wafer Maintenance
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