Strasbaugh nTellect (Model 7AF) Wafer Grinder
10 - 2 Version 1.2 - June 2004
PREVENTIVE MAINTENANCE SCHEDULES
Overview 3
Daily
Preventive Maintenance Schedule 4
7-Day or 5,000 Wafers
Preventive Maintenance Schedule 7
30-Day or 20,000 Wafers
Preventive Maintenance Schedule 11
180-Day or 80,000 Wafers
Preventive Maintenance Schedule 12
365-Day or 160,000 Wafers
Preventive Maintenance Schedule 14
To Next Page
Loading...
