Vacuum Robot Manual
4000-0315 Rev 1
77
UART. Universal Asynchronous Receiver-Transmitter. For a serial port.
Equipe controllers use 16C450 UART.
VAC. VACuum or Volts AC.
V
AC
. Volts alternating current.
V
DC
. Volts direct current.
VPR. PRI model designation for Vacuum Pre-aligner.
wafer carrier. Any cassette, box, pod, or boat that contains wafers, as
defined by SEMI.
Wafer Transport Plane. The plane coincident with the bottom surface of
the wafer as it is being transported. This plane complies with SEMI E21.1
and is the same for all modules and facets.
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