Strasbaugh nTellect (Model 7AF) Wafer Grinder
10 - 6 Version 1.2 - June 2004
Check the various dial pressure gauges (clean dry air supply, chuck air blow off, D.I.
water, and vacuum) to confirm that readings correspond with pneumatic maintenance
records -- see the Pneumatic Adjustments chapter of this manual for details. Adjust as
needed.
Incoming Clean Dry Air Supply Filter and Regulation System (Air Bearing Filters)
The incoming clean dry air supply filter and regulation system requires periodic
inspection, with frequency depending on the quality of the air supply. The filter
element should be visually inspected and replaced when contaminated.
The pressure dew point should not exceed 45° Fahrenheit.
Care should be taken to ensure that all air supply lines are thoroughly purged
before connection to the spindle.
TEFLON TAPE MUST NEVER BE USED ON CONNECTIONS
DOWNSTREAM OF THE FILTERS.
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