Operations and Maintenance Manual Preventive Maintenance Schedules
Version 1.2 - June 2004 10 - 7
7-DAY OR 5,000 WAFERS
PREVENTIVE MAINTENANCE SCHEDULE
WARNING:
Confirm that the diamond wheel is not spinning before beginning any maintenance
inspection or procedure.
SUBJECT
ACTION
ESTIMATED TIME TO
COMPLETE
• Control Computer, Robot
Controller, Pre-Aligner
Controller
Clean the air cooling
system.
Procedure will take approx.
10 min.
• D.I. Water Pressure
Check for adequate
pressure--30 psi
required.
Time required to check is
dependent upon customer
equipment (customer
facilities supplied filter).
• Drain Pans For Grinding
Chamber and Wafer Handling
Area
Check/clean. Refer to
“Notes” below.
Requires approx. 2 min. to
check. Corrective
procedure will take approx.
10 min.
• Grind Pan and Diamond
Wheel Housings
Clean.
Procedure requires approx.
20 min.
Frequency: After grinding,
when machine will sit idle
for long periods, or weekly.
• Grind Seals
• Clean.
• Apply a light film of
Molykote III (Dow
Corning ) lubricant.
Procedure requires approx.
5 min.
↓ (TABLE CONTINUED BELOW) ↓
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