Strasbaugh nTellect (Model 7AF) Wafer Grinder
10 - 8 Version 1.2 - June 2004
NOTES:
Air Cooling System of the Control Computer, the Robot Controller, and the Pre-
Aligner Controller
Once per week, check the air cooling system of the control computer, the robot
controller, and the pre-aligner controller. Frequency of checks is dependent on the
cleanliness of the surrounding environment. Clean the cooling air filter and check to
be sure that the cooling fan is rotating whenever the control computer is powered on.
Drain Pans for the Grinding Chamber and Wafer Handling
The drain pans for the grinding chamber and the wafer handling area should be
frequently checked and periodically cleaned out to prevent the drain hoses and piping
from clogging. Inspect the hoses for any blockages from debris. Check the drain pan
for wafer chips and remove. Check to be sure the pan drain is working properly.
To Next Page
Loading...
