Operations and Maintenance Manual Preventive Maintenance Schedules
Version 1.2 - June 2004 10 - 9
7-DAY OR 5,000 WAFERS
PREVENTIVE MAINTENANCE SCHEDULE
(CONTINUED)
SUBJECT
ACTION
ESTIMATED TIME TO
COMPLETE
• Grind Wheels
Check for wear and
damage; replace if
necessary.
Requires approx. 2 min. to
check.
Corrective procedure
(replace wheels, dress
wheels, reference wheels)
will take approx. 30 min.
• Machine Operation
(1) Rotation Of Turrets
(2) Robot Handling
(3) Spin-Rinse Station
Check each item:
(1) Check operation.
(2) Check operation.
(3) Check operation.
(1) Requires approx. 10
min. to check.
(2) Requires approx. 10
min. to check.
(3) Requires approx. 10
min. to check.
• Measurement Probe Housing
• Measurement Probe Bellows
• Wipe down.
• Clean and apply
Molykote III (Dow
Corning ) lubricant.
Procedure requires approx.
10 min.
• Measurement Probe Tip
Check for tightness
(secure fit).
Requires approx. 2 min. to
check. Corrective
procedure will take longer.
• Spin-Rinse Chuck Brush
Check/adjust height.
Requires approx. 5 min. to
check. Corrective
procedure will take longer.
↓ (TABLE CONTINUED BELOW) ↓
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