Strasbaugh nTellect (Model 7AF) Wafer Grinder
10 - 10 Version 1.2 - June 2004
7-DAY OR 5,000 WAFERS
PREVENTIVE MAINTENANCE SCHEDULE
(CONTINUED)
SUBJECT
ACTION
ESTIMATED TIME TO
COMPLETE
• Spin-Rinse Chuck Water
Check for adequate flow.
Requires approx. 5 min. to
check. Corrective
procedure will take longer.
• Vacuum Generator
Check output vacuum.
(3-6 in. Hg. required)
Requires approx. 5 min. to
check. Corrective
procedure will take longer.
• Water Pressure Across Filters
Check for adequate
pressure--less than
5 psi required.
Time required to check is
dependent upon customer
equipment (customer
facilities supplied filter).
• Water Transport Area:
(1) Cassette Platforms
(2) Pre-Aligner
(3) Robot
(4) Robot End Effector
(5) Robot Scanner Lenses
(6) Spin Station
(7) Pre-Aligner CCD Sensor
Clean with D. I. water
and mild soap.
DO NOT USE
ISOPROPYL
ALCOHOL!
CAUTION: Clean
scanner lenses with care!
Procedure will take approx.
20 min.
• Work Chuck Conditioner
Check for wear and
damage; replace if
necessary.
Requires approx. 20 min. to
check. Corrective
procedure will take longer.
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