Operations and Maintenance Manual Preventive Maintenance Schedules
Version 1.2 - June 2004 10 - 11
30-DAY OR 20,000 WAFERS
PREVENTIVE MAINTENANCE SCHEDULE
WARNING:
Confirm that the diamond wheel is not spinning before beginning any maintenance
inspection or procedure.
SUBJECT
ACTION
ESTIMATED TIME TO
COMPLETE
• Coolant Flow
Check/adjust.
Requires approx. 10 min. to
check. Corrective
procedure will take longer.
• Solenoid Valve Automatic
Lubricator
Location: Inside door 15.
Check. Fill reservoir to
line with NLGI #2 or
equivalent.
Requires approx. 5 min. to
check. Corrective
procedure will take longer.
• Work Chuck
Inspect and check
flatness.
Record:
Flatness in
inches ______
Procedure will take approx.
20 min.
• Conditioner Arm Air Motor
Lubricator
Check. Fill reservoir to
line with NLGI #2 or
equivalent.
Requires approx. 5 min. to
check. Corrective
procedure will take longer.
• Conditioner Arm Air Motor
Lubricator Oil Collector
Remove excess oil and
discard.
Requires approx. 5 min.
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