Strasbaugh nTellect (Model 7AF) Wafer Grinder
10 - 12 Version 1.2 - June 2004
180-DAY OR 80,000 WAFERS
PREVENTIVE MAINTENANCE SCHEDULE
WARNING:
Confirm that the diamond wheel is not spinning before beginning any maintenance
inspection or procedure.
SUBJECT
ACTION
ESTIMATED TIME TO
COMPLETE
• Ball Rails
(Up/Down)
Lubricate lightly with
NLGI #2 or equivalent.
Procedure will take approx.
5 min.
• Ball Screw
(Horizontal)
See “Note” below.
Lubricate lightly with
NLGI #2 or equivalent.
Procedure will take approx.
5 min.
• Ball Screw
(Upper Spindles, Up/Down Z-
Axis)
See “Note” below.
Lubricate lightly with
NLGI #2 or equivalent.
Procedure will take approx.
5 min.
• Bridge Drive Belt
Check/inspect for
cracking or fraying.
Replace if evident.
Requires approx. 5 min. to
check. Corrective
procedure will take longer.
• Exhaust Plenum
Clean.
Procedure will take approx.
20 min.
• Spin-Rinse Drive Belt
Check/inspect for
cracking or fraying.
Replace if evident.
Requires approx. 20 min. to
check. Corrective
procedure will take longer.
↓ TABLE CONTINUED BELOW ↓
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