Operations and Maintenance Manual Preventive Maintenance Schedules
Version 1.2 - June 2004 10 - 13
180-DAY OR 80,000 WAFERS
PREVENTIVE MAINTENANCE SCHEDULE
(CONTINUED)
SUBJECT
ACTION
ESTIMATED TIME TO
COMPLETE
• Upper Spindle Z-Axis Drive
Belts
Check/inspect for
cracking or fraying.
Replace if evident.
Requires approx. 5 min. to
check. Corrective
procedure will take longer.
NOTES:
Ball Screws
The ball screws are not served by the automatic lubrication system.
Bridge Drive Belt
The poly chain GT drive belt should be checked every six months for cracks or
fraying. Check the individual cogs of the belt for worn spots or cracks. Replace if
signs of wear are evident.
Spin-Rinse Drive Belt
The HTD power grip drive belt should be checked every six months for cracks or
fraying. Replace if signs of wear are evident.
Check tension annually.
Upper Spindle Z-Axis Belts
The HTD power grip drive belts should be checked every six months for cracks or
fraying. Check the individual cogs of the belt for worn spots or cracks. Replace if
signs of wear are evident.
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