Strasbaugh nTellect (Model 7AF) Wafer Grinder
10 - 14 Version 1.2 - June 2004
365-DAY OR 160,000 WAFERS
PREVENTIVE MAINTENANCE SCHEDULE
WARNING:
Confirm that the diamond wheel is not spinning before beginning any maintenance
inspection or procedure.
SUBJECT
ACTION
ESTIMATED TIME TO
COMPLETE
• Robot Position Alignment
(Radial, Theta, Z)
Calibrate.
Procedure will take approx.
5 min. per station.
(For all 8 stations, 40
minutes maximum.)
• RPM Settings:
(1) Coarse Wheel
(2) Fine Wheel
(3) Left Work Chuck
(4) Right Work Chuck
(5) Spin Chuck
Confirm for each item:
(1) Screen read-out.
(2) Actual.
Procedure will take approx.
30 min.
• Spindle Alignment
Note especially the Robot Flip
Position.
Check mechanical
adjustment annually or
as required.
Requires approx. 5 min. to
check. Corrective
procedure will take longer.
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