Operations and Maintenance Manual Preventive Maintenance Schedules
Version 1.2 - June 2004 10 - 15
365-DAY OR 160,000 WAFERS
PREVENTIVE MAINTENANCE SCHEDULE
(CONTINUED)
SUBJECT
ACTION
ESTIMATED TIME TO
COMPLETE
• Upper Spindle Weight Force
Calibrate.
Procedure will take approx.
1 hr.
• Vacuum Pump
(Stand-alone vacuum system,
located adjacent to machine.)
Clean.
Procedure will take approx.
1 hr.
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