Strasbaugh nTellect 7AF - Page 261

Operations and Maintenance Manual Mechanical Maintenance Procedures
Version 1.2 - June 2004 11 - 1
11
Mechanical Maintenance
Procedures
• Manual Control of Assemblies
• Initial Alignments
• Bridge
• Spindles
• Digital Probes
• Robot
• Pre-Aligner
• Spin/Rinse Station
• Cassette Turrets