Strasbaugh nTellect (Model 7AF) Wafer Grinder
11 - 2 Version 1.2 - June 2004
MECHANICAL MAINTENANCE PROCEDURES
Overview 4
Manual Control of Assemblies 6
Menus Used in the Mechanical Maintenance Procedures 6
Manual Movement of the Bridge with Machine Power OFF 7
Initial Alignments 8
Grinding Area 8
Summary 9
I. Before You Begin 10
II. Level the Horizontal Rails of the Bed 15
III. Level the Lower Left and Right Spindle Assemblies 19
IV. Mount the Fringe Plates to the Lower Spindle Assemblies and Adjust 28
V. Adjust Upper Spindle Assemblies to Positions Parallel with Lower Right Spindle 34
VI. Adjust Lower Left Spindle Assembly Parallel to Upper Spindle Assemblies 43
VII. Bridge Left/Right Travel Proximity Sensor Adjustments 48
VIII. Spindle Z Travel Proximity Sensor Adjustments 61
IX. When Grinding Area Initial Adjustments are Successful 68
Handling Area 69
Summary 69
I. Before You Begin 70
II. Level the Robot 72
III. Level the Robot End Effector 74
IV. Align the Pre-Aligner with the Robot 79
V. Align the Spin-Rinse Station with the Robot 84
VI. Level the Four Cassette Platforms (Turrets) 92
VII. Adjust the Bed to a Position Parallel to the Robot 109
VIII. When Grinding Area and Handling Area Initial Alignments are Complete 114
Bridge 115
Horizontal Travel Belt Adjustment 115
Spindles 118
Z Travel Belt Adjustment 118
Changing the Grind Wheels 120
Changing the Work Chucks 127
Digital Measurement Probes 134
Assembly Height Adjustments 134
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