Strasbaugh nTellect (Model 7AF) Wafer Grinder
11 - 12 Version 1.2 - June 2004
5. Disconnect the utility hoses joining the grinding area facilities to the handling
area:
a. Disconnect the 1-inch drain from the bottom of the plenum.
b. Disconnect the D.I. water line from its connection underneath the spin-
rinse station by depressing its quick disconnect and pulling.
c. Unclamp the retaining ring of the 5-inch exhaust hose from the plenum.
Pull the exhaust duct hose off its connection.
6. Continue to rotate the handling section clockwise to provide access to the
grinding section of the machine.
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