Strasbaugh nTellect (Model 7AF) Wafer Grinder
1 - 8 Version 1.2 - June 2004
ELECTRICAL DISTRIBUTION AND CONTROL
The Model 7AF Wafer Grinder’s electrical distribution and control systems are
designed to provide all necessary control functions for polish process optimization
while maintaining the reliability and ease of use necessary for the production
environment.
The heart of the control system is the control computer, an industrial personal
computer (PC), providing maximum reliability and functionality in an industry standard
package. A high resolution color monitor with touch screen interfaces the grinder
with the user through menu-oriented commands displayed on the monitor.
The 7AF uses a standard "off the shelf" computer package rather than a customized
card cage package to maintain simplicity, reliability, and economy. In addition to the
control computer and interface hardware, the control system includes in situ
measurement of thickness control (via a card residing in slot 1 of the control
computer), an industry standard input/output (I/O) system (card in slot 2), and
dedicated control of eight of the grinder's servo motor axes, (card in slot 3). The axes
controlled through slot 3 are work chuck left and right, Z travel of the coarse and fine
grind spindles, side to side motion of the bridge, the spin-rinse station, and rotation of
the two grind spindles. Motors and controllers for each of the eight axes (all grinding
and bridge motions and the spin-rinse station) are located at the lower right side of the
machine. The two inverters for the two upper spindles reside in the inverter enclosure
at the rear of the machine. Controllers for the robot and pre-aligner are located at the
lower left side of the machine.
The control computer, robot and pre-aligner controllers, input/output,
servo motor controllers, digital measurement probes, and the robot/pre-aligner teach
terminal maintain communication for complete control of all machine functions. Note
that with further development of the control software, the teach terminal will be
eliminated.
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