Operations and Maintenance Manual Introduction
Version 1.2 - June 2004 1 - 7
MECHANICAL COMPONENTS
The machine consists of two major mechanical components (the grinding area and the
wafer handling area), each enclosed within separate machine cabinet sections which
detach for easy access to internal components. Together the cabinet sections form a
grind area and protective user enclosure to provide a sturdy, safe and clean grinding
process:
• The grinding section of the machine encompasses four air bearing spindles.
The two air bearing coarse and fine grind upper spindles are functionally
identical and designated as coarse or fine only by the type of diamond wheel
installed. The upper spindles are enclosed within a bridge which travels
linearly to alternately or simultaneously coarse and fine grind the product.
The two air bearing work (lower) spindles and their support mechanisms are
mechanically identical. The 8 1/4-inch diameter ceramic work chucks may be
used with both six and eight-inch wafers.
Single work chuck wafer stationing for stock removal and finish grinding
diminishes the chance of damaging or breaking the wafer through additional
handling or placing the wafer on a contaminated chuck. The height of the
work chuck is checked at the beginning of a grind cycle and intermittently as
the process requires (in case the chuck heats and rises) to assure accuracy in
grinding. Probe measurement of the wafer is relative to the height of the
work chuck.
Inflatable seals envelope each grind chamber, capturing vapor and particles
which are exhausted out via a plenum.
• The wafer handling area is an assembly designed to provide a safe and
convenient method for robotic loading and unloading of wafers. Rotary
actuators under each of the four cassette platforms rotate the cassettes 180 °
to present them to the robot or the operator. A pre-aligner orients the wafer
before grinding; after grinding a spin-rinse station cleans and dries the wafer.
Mechanical, electrical, and software interlocks provide complete user safety
for all machine operations.
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