Strasbaugh nTellect (Model 7AF) Wafer Grinder
11 - 74 Version 1.2 - June 2004
III. LEVEL THE ROBOT END EFFECTOR
NOTICE! WHENEVER THE ROBOT OR THE ROBOT END EFFECTOR
IS LEVELED, THE THREE PROCEDURES LISTED BELOW
MUST BE PERFORMED ALSO:
• Align the Pre-Aligner with the Robot
• Align the Spin-Rinse Station with the Robot
• Level the Four Cassette Platforms
Notes:
This procedure is done twice--once with the end effector positioned vacuum seal up
and once with the vacuum seal down.
Tools Required
• circular bubble level
• test wafer
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