Operations and Maintenance Manual Mechanical Maintenance Procedures
Version 1.2 - June 2004 11 - 77
END EFFECTOR VACUUM SEAL DOWN
9. Rotate the robot wrist to position the end effector vacuum seal down:
Touch to Select Explanation/Screen Display
a. Robot icon At the Machine Maintenance menu, touch the
"Robot" icon to select the Robot drop down
menu.
b. Rotate Wrist Touch the "Rotate Wrist" button.
The robot arm should now be positioned vacuum seal down.
10. Repeat Steps 3. through 7., above in this section, to level the end effector with
the vacuum seal down.
11. When the end effector has been leveled in both the seal up and seal down
positions, recheck the level readings to confirm the positioning:
a. Repeat Steps 3. through 9., immediately above, to rotate the wrist and
recheck the wafer in both up and down positions.
b. If needed, repeat the adjustments.
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