Strasbaugh nTellect (Model 7AF) Wafer Grinder
11 - 76 Version 1.2 - June 2004
2. If needed, rotate the robot wrist to position the robot end effector vacuum
seal up:
Touch to Select Explanation/Screen Display
a. Robot icon At the Output Control/Input Status menu, touch
the "Robot" icon to select the Robot drop down
menu.
b. Rotate Wrist Touch the "Rotate Wrist" button until the arm is
positioned with the vacuum seal up.
3. Manually hold a test wafer centered on the end effector until it takes vacuum
and is retained by the end effector.
4. Place a circular bubble level on the wafer positioned near the end effector (near
the center of the wafer).
5. Read the level.
GOAL: The reading of the level (the bubble) should be centered
within the level's circle.
6. Correct the up/down positioning:
• Adjust the mounting bolts located on the robot arm actuator shaft by
rotating them clockwise or counterclockwise as needed to meet the goal.
7. Correct the side to side positioning:
• Adjust the hard stops' position sensors of the rotary actuator by rotating
them clockwise or counterclockwise as needed to meet the goal.
8. When the goal has been met, remove the level.
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