Operations and Maintenance Manual Mechanical Maintenance Procedures
Version 1.2 - June 2004 11 - 81
2. Manually hold a test wafer centered under the end effector until it takes
vacuum and is retained by the end effector.
3. To permit manual movement of the robot arm, turn OFF the robot servos:
Touch to Select Explanation/Screen Display
a. Robot icon At the Output Control/Input Status menu, touch
the "Robot" icon to select the Robot drop down
menu.
b. Servos Touch the "Servos" button to select the Robot
Servos submenu.
c. R ON/OFF Touch the "R ON/OFF" until
R OFF is displayed, indicating the radial axis
servo is off.
d. Theta ON/OFF Touch the "Theta ON/OFF" until
Theta OFF is displayed, indicating the theta axis
servo is off.
e. Z ON/OFF Touch the "Z ON/OFF" until
Z OFF is displayed, indicating the Z axis servo is
off.
4. Manually extend the robot end effector over the pre-aligner chuck.
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