Strasbaugh nTellect (Model 7AF) Wafer Grinder
11 - 82 Version 1.2 - June 2004
Test
5. Visually check the position of the wafer relative to the pre-aligner chuck:
GOAL: While still being supported by the end effector, the wafer
should be parallel to the pre-aligner chuck.
If the goal is not met, correct the position by following the procedure in Step
6., immediately below.
6. Correct the position of the pre-aligner by adjusting the four
pre-aligner mounting bolts, one located at each corner of the
pre-aligner:
For each bolt requiring adjustment:
a. Loosen the pre-aligner mounting bolt by rotating it counterclockwise.
b. Using the small stock pieces as shims, place the shim stock between the
bottom of the pre-aligner and the top of the mounting surface as needed to
meet the goal.
c. When the goal has been met, tighten the mounting bolts with the shims
between the two surfaces.
7. When the Test goal has been met, return the robot to its retracted position:
a. Manually return the robot to its retracted position over the robot base.
b. Then, turn the robot servos back ON by following the procedure below:
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