Operations and Maintenance Manual Mechanical Maintenance Procedures
Version 1.2 - June 2004 11 - 83
Touch to Select Explanation/Screen Display
i. Robot icon At the Output Control/Input Status menu, touch
the "Robot" icon to select the Robot drop down
menu.
ii. Servos Touch the "Servos" button to select the Robot
Servos submenu.
iii. R ON/OFF Touch the "R ON/OFF" until
R ON is displayed, indicating the radial axis
servo is on.
iv. Theta ON/OFF Touch the "Theta ON/OFF" until
Theta ON is displayed, indicating the theta axis
servo is on.
v. Z ON/OFF Touch the "Z ON/OFF" until
Z ON is displayed, indicating the Z axis servo is
on.
8. Remove the wafer from the robot end effector:
a. While holding the wafer with one hand,
b. turn vacuum OFF to the end effector, releasing the wafer:
Touch to Select Explanation/Screen Display
i. Robot icon At the Output Control/Input Status menu, touch
the "Robot" icon to select the Robot drop down
menu.
ii. Vacuum
ON/OFF Touch the "Vacuum ON/OFF" button until
Vacuum OFF is displayed.
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