Strasbaugh nTellect (Model 7AF) Wafer Grinder
11 - 84 Version 1.2 - June 2004
V. ALIGN THE SPIN-RINSE STATION WITH THE ROBOT
Tools Required
• 3/16-in. hex key
• 1/8-in. hex key
• test wafer
Confirm that Compressed Air Is ON
Follow the procedures found in the Operator Functions chapter of this manual.
Confirm that Power Is ON
Follow the procedures found in the Operator Functions chapter of this manual.
Confirm that Vacuum Is ON
Follow the procedures found in the Operator Functions chapter of this manual.
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