Operations and Maintenance Manual Mechanical Maintenance Procedures
Version 1.2 - June 2004 11 - 87
2. Turn OFF robot servos to permit manual movement of the robot arm:
Touch to Select Explanation/Screen Display
a. Robot icon At the Output Control/Input Status menu, touch
the "Robot" icon to select the Robot drop down
menu.
b. Servos Touch the "Servos" button to select the Robot
Servos submenu.
c. R ON/OFF Touch the "R ON/OFF" until
R OFF is displayed, indicating the radial axis
servo is off.
d. Theta ON/OFF Touch the "Theta ON/OFF" until
Theta OFF is displayed, indicating the theta axis
servo is off.
e. Z ON/OFF Touch the "Z ON/OFF" until
Z OFF is displayed, indicating the Z axis servo is
off.
3. Manually hold a test wafer centered under the end effector until it takes
vacuum and is retained by the end effector.
4. Manually extend the robot end effector over the spin-rinse station chuck.
To Next Page
Loading...
