Strasbaugh nTellect (Model 7AF) Wafer Grinder
11 - 88 Version 1.2 - June 2004
5. If the robot won't stay where you place it, turn the robot servos back ON by
following the procedure below:
Touch to Select Explanation/Screen Display
i. Robot icon At the Output Control/Input Status menu, touch
the "Robot" icon to select the Robot drop down
menu.
ii. Servos Touch the "Servos" button to select the Robot
Servos submenu.
iii. R ON/OFF Touch the "R ON/OFF" until
R ON is displayed, indicating the radial axis
servo is on.
iv. Theta ON/OFF Touch the "Theta ON/OFF" until
Theta ON is displayed, indicating the theta axis
servo is on.
v. Z ON/OFF Touch the "Z ON/OFF" until
Z ON is displayed, indicating the Z axis servo is
on.
Test
6. Visually check the position of the wafer relative to the spin-rinse station chuck:
GOAL: While still being supported by the end effector, the wafer
should be parallel to the spin-rinse chuck.
If the goal is not met, correct the position by following the procedure in Step
7., immediately below.
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