Operations and Maintenance Manual Mechanical Maintenance Procedures
Version 1.2 - June 2004 11 - 105
e. Z ON/OFF Touch the "Z ON/OFF" until
Z OFF is displayed, indicating the Z axis servo is
off.
7. Manually move the robot end effector into the bottom slot of the cassette.
8. Check the position of the wafer:
GOAL: While still being supported by the end effector, the wafer must
sit in the slot without touching the top or bottom of the slot.
If the goal is not met, correct the position by following the procedure in Step
7., immediately below.
9. Correct the position of the platform by adjusting the three
1/4-20 hold down screw and 1/4-20 adjusting setscrew pairs located below the
platform:
For each pair requiring adjustment:
a. Using a 3/16-in. hex key, loosen the 1/4-20 hold down screw by rotating it
counterclockwise.
b. Using a 1/8-in. hex key, rotate the 1/4-20 adjusting setscrew as needed to
meet the goal.
c. When the goal has been met, retighten all the 1/4-20 hold down screws by
rotating them clockwise to firm.
10. When the wafer positioning goal has been met, recheck the position of the
plexiglass turret window:
GOAL: The plexiglass window should be positioned such that the
distance between the door and the frame all around is
approximately 1/16-in.
AND
no window corners are rubbing against the frame.
If needed correct the window position:
a. Open the four screw covers.
b. Rotate each screw counterclockwise to loosen slightly.
c. Manually readjust the window position.
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