Strasbaugh nTellect (Model 7AF) Wafer Grinder
11 - 104 Version 1.2 - June 2004
3. At the Output Control/Input Status menu, turn vacuum ON to the robot end
effector:
Touch to Select Explanation/Screen Display
a. Robot icon At the Output Control/Input Status menu, touch
the "Robot" icon to select the Robot drop down
menu.
b. Vacuum ON/OFF Touch the "Vacuum ON/OFF" button until
Vacuum ON is displayed.
4. If needed, rotate the wrist to position the robot end effector vacuum chuck up:
Touch to Select Explanation/Screen Display
a. Robot icon At the Output Control/Input Status menu, touch
the "Robot" icon to select the Robot drop down
menu.
b. Rotate Wrist Touch the "Rotate Wrist" button until the arm is
positioned with the vacuum chuck up.
5. Manually place a test wafer on the end effector until it takes vacuum and is
retained by the end effector.
6. To permit manual movement of the robot arm, turn OFF the robot servos:
Touch to Select Explanation/Screen Display
a. Robot icon At the Output Control/Input Status menu, touch
the "Robot" icon to select the Robot drop down
menu.
b. Servos Touch the "Servos" button to select the Robot
Servos submenu.
c. R ON/OFF Touch the "R ON/OFF" until
R OFF is displayed, indicating the radial axis
servo is off.
d. Theta ON/OFF Touch the "Theta ON/OFF" until
Theta OFF is displayed, indicating the theta axis
servo is off.
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