Operations and Maintenance Manual Mechanical Maintenance Procedures
Version 1.2 - June 2004 11 - 103
FINE ADJUSTMENT - LEVELING AGAINST THE ROBOT
Cassette Platform (Turret) 1
Before You Begin
1. Confirm that air and vacuum are ON.
2. Confirm that machine is powered up.
Procedure
1. Place a cassette on the platform.
Use a cassette that will accommodate the largest wafer you plan to
process.
2. Rotate the turret back to its robot position (facing the robot):
Touch to Select Explanation/Screen Display
• Cassette 1
icon At the Output Control/Input Status menu, touch
the "Cassette 1" (Send1 Cassette) icon at the
Output Control/Input Status Menu to rotate its
platform.
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