Strasbaugh nTellect (Model 7AF) Wafer Grinder
11 - 140 Version 1.2 - June 2004
ROBOT
The robot is a pre-adjusted, self-contained unit. Essential mechanical adjustments are
included in the Initial Adjustments section of this chapter.
For further information on adjustments internal to the robot, refer the following:
• the Software Calibration chapter of this manual.
• the Equipe Technologies Robot Technical Manual, included in Appendix G of this
(the 7AF) manual.
To Next Page
Loading...
