Operations and Maintenance Manual Software Calibration
Version 1.2 - June 2004 12 - 3
SOFTWARE CALIBRATION
PROCEDURES
OVERVIEW
This Software Calibration chapter provides details on the menus used in maintenance
and calibration procedures as well as information on the software calibration required
for the wafer handling robot (and pre-aligner).
Messages Displayed on the Control Computer Screen Take Precedence!
Messages and information displayed on the control computer screen always take
precedence over information in this manual.
Because control computer software can be updated more rapidly than manual
information, onscreen directions may be more current than the contents of this manual.
Should the manual and the screen information conflict, always follow the
onscreen directions.
Assumptions
The procedures below were written with the assumption that the reader is thoroughly
familiar with the Model 7AF Wafer Grinder. If not, read the chapters in this manual
on Physical Description, Installation, Mechanical Description, Control System
Description, Power Distribution, and Plumbing Description before beginning any
procedure.
Error Messages
See the Troubleshooting chapter of this manual for resolution of any onscreen error
messages not covered in this chapter.
To Next Page
Loading...
